New developments in bulk micromachining by powder blasting

Wensink, H. and Elwenspoek, M.C. (2001) New developments in bulk micromachining by powder blasting. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA.

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Item Type:	Conference or Workshop Item
Copyright:	© 2001 Kluwer
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/36002
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