Multi-walled microchannels: free-standing porous silicon membranes for use in µTAS

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Tjerkstra, R. Willem and Gardeniers, Johannes G.E. and Kelly, John J. and Berg van den, Albert (2000) Multi-walled microchannels: free-standing porous silicon membranes for use in µTAS. Journal of Microelectromechanical Systems, 9 (4). pp. 495-501. ISSN 1057-7157

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Abstract:Electrochemically formed porous silicon (PS) can be released from the bulk silicon substrate by underetching at increased current density. Using this technique, two types of channels containing free-standing layers of PS were constructed, which were failed multi-walled microchannels (MW µCs). They can be used in devices like microsieves, microbatteries, and porous electrodes. Two types of MWµC were made: the 'conventional' version, consisting of two or more coaxially constructed microchannels separated by a suspended PS membrane, and the buried variety, where a PS membrane is suspended halfway in an etched cavity surrounded by silicon nitride walls. The latter is more robust. The pore size of the PS was measured using transmission electron microscopy and field emission gun scanning electron microscopy (FEGSEM) and found to be of the order of 7 nm
Item Type:Article
Copyright:© 2000 IEEE
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/35999
Official URL:http://dx.doi.org/10.1109/84.896771
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