Adhesion and frinction in MEMS

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Tas, N.R. and Vogelzang, A.H. and Elwenspoek, M.C. and Legtenberg, R. (1997) Adhesion and frinction in MEMS. In: Proceedings Micro/nana tribology and it's applications.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/33420
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Metis ID: 145700