Adhesion and frinction in MEMS

Tas, N.R. and Vogelzang, A.H. and Elwenspoek, M.C. and Legtenberg, R. (1997) Adhesion and frinction in MEMS. In: Proceedings Micro/nana tribology and it's applications.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/33420
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