You seem to be attempting to access an item that has been removed from the repository.
The item you are trying to access was a duplicate of:
Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).