Silicon oxynitride in integrated optics

Wörhoff, Kerstin and Ridder de, René M. and Lambeck, Paul V. and Driessen, Alfred (1998) Silicon oxynitride in integrated optics. In: IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS, 1-4 December 1998, Orlando, USA.

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Abstract:	A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed
Item Type:	Conference or Workshop Item
Copyright:	©1998 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/25885
Official URL:	http://dx.doi.org/10.1109/LEOS.1998.739716
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