Silicon oxynitride in integrated optics


Wörhoff, Kerstin and Ridder, René M. de and Lambeck, Paul V. and Driessen, Alfred (1998) Silicon oxynitride in integrated optics. In: IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS, 1-4 December 1998, Orlando, USA (pp. pp. 370-371).

open access
Abstract:A review on the state of the art of silicon oxynitride deposition at the MESA Research Institute will be given. The recent progress in the application of silicon oxynitride in communication devices will be discussed
Item Type:Conference or Workshop Item
Copyright:©1998 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Official URL:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 130688