Design and realisation of a quasi monolithic silicon load cell

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Wensink, H. and Wiegerink, R.J. and Zwijze, A.F. and Boer de, M.J. and Elwenspoek, M.C. (1998) Design and realisation of a quasi monolithic silicon load cell. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway.

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Abstract:In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg. A prototype has been realised. An improved cryogenic RIE process with high aspect ratio was developed for the fabrication of thin springs. Low temperature silicon direct bonding was used for the final assembly. The mechanical structure was tested using poly silicon strain gauges. Encapsulated resonant strain gauges [1] will be used in the final design in order to obtain the desired accuracy of 0.03%.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/25570
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