Piezoresistive friction force sensor for tribological research

Burger, J.F. and Berenschot, J.W. and Visscher, H. and Elwenspoek, M.C. (1997) Piezoresistive friction force sensor for tribological research. In: Micro Mechanics Europe, MME 1997, Aug. 31 - Sept. 2, 1997, Southampton, England.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Transducers Science and Technology (TST)
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Metis ID: 130224