Piezoresistive friction force sensor for tribological research

Burger, Johannes and Berenschot, Erwin and Burger, Gert-Jan and Visscher, Harm and Elwenspoek, Miko (1998) Piezoresistive friction force sensor for tribological research. Journal of Micromechanics and Microengineering, 8 (2). pp. 138-140. ISSN 0960-1317

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Abstract:	A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a silicon wafer.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 1998
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/24831
Official URL:	http://dx.doi.org/10.1088/0960-1317/8/2/023
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Metis ID: 129632