Piezoresistive friction force sensor for tribological research

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Burger, Johannes and Berenschot, Erwin and Burger, Gert-Jan and Visscher, Harm and Elwenspoek, Miko (1998) Piezoresistive friction force sensor for tribological research. Journal of Micromechanics and Microengineering, 8 (2). pp. 138-140. ISSN 0960-1317

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Abstract:A piezoresistive friction force sensor for tribological research on magnetic storage devices was designed, realized and characterized. A very simple potassium hydroxide etching technique was used for the fabrication of a rectangular shaped construction in a silicon wafer.
Item Type:Article
Additional information:Special issue featuring papers from the 8th Workshop on Micromachining, Micromechanics and Microsystems (MME'97)
Copyright:© Institute of Physics and IOP Publishing Limited 1998
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/24831
Official URL:http://dx.doi.org/10.1088/0960-1317/8/2/023
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Metis ID: 129632