An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling

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Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling. Journal of Microelectromechanical Systems, 7 (1). pp. 79-86. ISSN 1057-7157

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Abstract:This paper presents design issues and a theoretical model of electrostatically driven axial-gap polysilicon wobble motors. The motor design benefits from large axial rotor-to-stator overlap and large gear ratios, and motor designs with rotor radii of 50 and 100 ¿m are capable of generating torques in the nanoNewtonmeter range at high electrostatic fields. Because of the large gear ratio, smaller angular steps and lower rotational speed are obtained, compared to radial-gap motor designs. Aspects like gear ratio, torque generation, excitation schemes and torque coverage, normal forces, friction, rotor kinetics, and dynamical behavior are addressed. The motor design is compliant to the integration of gear linkages with respect to mechanical power transmission
Item Type:Article
Copyright:© 1998 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/24829
Official URL:http://dx.doi.org/10.1109/84.661387
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Metis ID: 129630