A detailed analysis of the optical beam deflection technique for use in atomic force microscopy

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Putman, Constant A.J. and Grooth de, Bart G. and Hulst van, Niek F. and Greve, Jan (1992) A detailed analysis of the optical beam deflection technique for use in atomic force microscopy. Journal of Applied Physics, 72 (1). pp. 6-12. ISSN 0021-8979

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Item Type:Article
Copyright:© 1992 American Institute of Physics
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Link to this item:http://purl.utwente.nl/publications/24674
Official URL:http://dx.doi.org/10.1063/1.352149
Publisher URL:http://link.aip.org/link/?JAPIAU/72/6/1
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Metis ID: 129475