Near-field optical microscope using a silicon-nitride probe


Hulst, N.F. van and Moers, M.H.P. and Noordman, O.F.J. and Tack, R.G. and Segerink, F.B. and Bölger, B. (1993) Near-field optical microscope using a silicon-nitride probe. Applied physics letters, 62 (5). pp. 461-463. ISSN 0003-6951

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Abstract:Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging o­n arbitrary surfaces without tip destruction. The effect of adhesion forces o­n the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.
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Copyright:© 1993 American Institute of Physics
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