Microfabrication of near-field optical probes

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Ruiter, A.G.T. and Moers, M.H.P. and Hulst van, N.F. and Boer de, M. (1996) Microfabrication of near-field optical probes. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 14 (2). pp. 597-601. ISSN 1071-1023

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Abstract:Near-field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub-wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based o­n atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near-field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results o­n a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image. (C) 1996 American Vacuum Society.
Item Type:Article
Copyright:© 1996 American Vacuum Society
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/24559
Official URL:http://dx.doi.org/10.1116/1.589142
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