Kinetic roughening of vicinal Si(001)

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Hegeman, P.E. and Zandvliet, H.J.W. and Kip, G.A.M. and Silfhout van, A. (1994) Kinetic roughening of vicinal Si(001). Surface Science, 311 (1-2). L655-L660. ISSN 0039-6028

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Abstract:The kinetic roughening behavior of vicinal Si(001) surfaces is studied with scanning tunneling microscopy. By analyzing the height-height correlation function of the Si layers that have been grown we found, in the case of islands growth, an algebraic roughening behavior with a roughness exponent of 0.68 ± 0.05. In the step flow mode, however, we found non-algebraic roughening behavior.
Item Type:Article
Copyright:© 1994 Elsevier Science
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/24074
Official URL:http://dx.doi.org/10.1016/0039-6028(94)90468-5
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