Kinetic roughening of vicinal Si(001)


Hegeman, P.E. and Zandvliet, H.J.W. and Kip, G.A.M. and Silfhout, A. van (1994) Kinetic roughening of vicinal Si(001). Surface science, 311 (1-2). L655-L660. ISSN 0039-6028

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Abstract:The kinetic roughening behavior of vicinal Si(001) surfaces is studied with scanning tunneling microscopy. By analyzing the height-height correlation function of the Si layers that have been grown we found, in the case of islands growth, an algebraic roughening behavior with a roughness exponent of 0.68 ± 0.05. In the step flow mode, however, we found non-algebraic roughening behavior.
Item Type:Article
Copyright:© 1994 Elsevier Science
Science and Technology (TNW)
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