Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguide for Communication Devices

Wörhoff, Kerstin and Lambeck, Paul V. and Driessen, Alfred (1999) Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguide for Communication Devices. Journal of Lightwave Technology, 17 (8). pp. 1401-1407. ISSN 0733-8724

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Abstract:	Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results
Item Type:	Article
Copyright:	©1999 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/23951
Official URL:	http://dx.doi.org/10.1109/50.779161
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