Materials aspects of integrated high-Tc dc-SQUID magnetometer fabrication

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Hilgenkamp, J.W.M. and IJsselsteijn, R.P.J. and Rijnders, A.J.H.M. and Tavares, P.A.C. and Flokstra, J. and Rogalla, H. (1993) Materials aspects of integrated high-Tc dc-SQUID magnetometer fabrication. Journal of alloys and compounds, 195 . pp. 707-710. ISSN 0925-8388

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Abstract:An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.
Item Type:Article
Copyright:© 1993 Elsevier Science
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/23726
Official URL:http://dx.doi.org/10.1016/0925-8388(93)90835-B
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Metis ID: 128525