Selective epitaxial growth of sub-micron structures of YBaCuO by substrate modification

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Blank, Dave H.A. and Damen, Cas A.J. and Kropman, Boike L. and Rogalla, Horst (1994) Selective epitaxial growth of sub-micron structures of YBaCuO by substrate modification. Physica C: Superconductivity, 235-24 (1). pp. 645-646. ISSN 0921-4534

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Abstract:Sub-micron structures of high-Tc thin films have been realized with Selective Epitaxial Growth (SEG). Two different techniques to achieve SEG have been studied. First, narrow trenches down to 100 nm are etched into the substrate with a four-layer E-beam lithography technique. Second, amorphous metal layers have been used to define pattern definition masks. Besides the suitability of both techniques, also the potential to combine these techniques is part of this study.
Item Type:Article
Copyright:© 1994 Elsevier Science
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/23558
Official URL:http://dx.doi.org/10.1016/0921-4534(94)91546-6
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