Silicon microstructures for fluid handling

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Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Silicon microstructures for fluid handling. ABB-nieuwsbrief, 1994 (9). pp. 9-12. ISSN 0925-1529

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 116918