Silicon microstructures for fluid handling
Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Silicon microstructures for fluid handling. ABB-nieuwsbrief, 1994 (9). pp. 9-12. ISSN 0925-1529
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| Item Type: | Article |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
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| Link to this item: | http://purl.utwente.nl/publications/17663 |
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