Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method

Bielen, J.A. and Schmidt, A.W. and Weiel, R. and Rutten, W.L.C. (1996) Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method. In: 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Amsterdam 1996. Bridging Disciplines for Biomedicine.

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Abstract:	The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses
Item Type:	Conference or Workshop Item
Copyright:	©1996 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical Signals and Systems (BSS)
Link to this item:	http://purl.utwente.nl/publications/17371
Official URL:	http://dx.doi.org/10.1109/IEMBS.1996.656947
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