Quasi-monolithic planar load cells using built-in resonant strain gauges


Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. In: 4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93) (pp. pp. 133-137).

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Abstract:Two load cell designs are presented using resonant strain gauges providing a frequency output. One design is based on a four-point beam deflection jig. It offers high sensitivity, but suffers from robustness and impractical geometries for a broad force range. A modified planar design (typical dimensions 1-10 mm) removes these drawbacks and in addition features built-in force reduction, overhead protection and compensation of common mode effects. Load ranges vary from high (1 500 N) to very low (0.03 N), with theoretically achievable resolutions as high a 1 part in 107.
Item Type:Conference or Workshop Item
Copyright:© Institute of Physics and IOP Publishing Limited 1993
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/17247
Official URL:https://doi.org/10.1088/0960-1317/3/4/006
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