Dynamic response of silicon resonant sensors

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Prak, A. and Lammerink, T.S.J. and Fluitman, J.H.J. and Elwenspoek, M.C. (1993) Dynamic response of silicon resonant sensors. In: 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993, June 7-10, 1993, Yokohama, Japan (pp. pp. 206-209).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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