Modular concept for miniature chemical systems

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Berg van den, A. and Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Bergveld, P. (1995) Modular concept for miniature chemical systems. In: International Conference on Integrated Micro/Nanotechnology for Space Applications, October 30 - November 3, 1995, Houston, Texas.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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