A µsensor array in a fluidic system for space applications


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Spiering, V.L. and Bergveld, P. and Elwenspoek, M.C. and Berg van den, A. (1996) A µsensor array in a fluidic system for space applications. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands.

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Abstract:The development of a hybrid integration method for a multi µsensor array unit in a fluid channel on a breadboard is presented. The method is illustrated by means of the fabrication of a demonstrator micro fluid analysis system, also called a Micro Total Analysis System (uTAS), containing a pressure-, temperature-, pH-, pO2 and pCO2-sensor. This system is designed for a multi-user and multi-purpose application in life science, biotechnology research, and life support systems according to the technical requirements for space.
Item Type:Conference or Workshop Item
Copyright:© 1996 Delft University Press
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/17238
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