Physical chemistry of wetchemical anisotropic etching of silicon

Elwenspoek, M.C. (1995) Physical chemistry of wetchemical anisotropic etching of silicon. In: 1995 ASME International mechanical engineering congress and exposition, gerefereed.

Preview

PDF
751Kb

Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17236
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 114131

Education
▪ Behavioural Sciences
▪ Management and Governance
▪ Engineering Technology
▪ Electrical Engineering, Mathematics and Computer Science
▪ Science and Technology
▪ Geo-Information Science and Earth Observation
▪ Overview programmes

Research
▪ Centre for Telematics and Information Technology
▪ Institute for Behavioral Research
▪ Institute for Innovation and Governance Studies
▪ Institute of Mechanics, Processes and Control
▪ Mesa+ Institute for Nanotechnology
▪ MIRA Biomedical Technology and Technical Medicine

Cooperation
▪ Alumni
▪ Universiteitsfonds
▪ Kennispark Twente
▪ Entrepreneurs
▪ The Science Shop
▪ Press