An electrochemical micro actuator

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) An electrochemical micro actuator. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands.

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Abstract:	In this paper an investigation of the feasibility of a new electrochemical micro actuator is presented. The actuator is fabricated using silicon micro-machining techniques. A gas pressure is generated by electrolysis of an aqueous electrolyte solution. The build up pressure is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reduce the pressure. The advantage of this type of actuation is a low energy consumption. The power is required during pressure build up and to change the states.
Item Type:	Conference or Workshop Item
Copyright:	© 1995 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17226
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