Nonlinearity and hysteresis of resonant strain gauges


Share/Save/Bookmark

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

open access
[img]
Preview
PDF
406kB
Abstract:Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.
Item Type:Conference or Workshop Item
Copyright:© 1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/17225
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 114120