The μ-flown: A Novel Device Measuring Acoustical Flows

Bree de, Hans-Elias and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo and Elwenspoek, Miko (1995) The μ-flown: A Novel Device Measuring Acoustical Flows. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden.

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Abstract:	An acoustical wave consists of two elements, the acoustic pressure and the acoustic flow. Till now to determine the acoustic flow one has had, to measure the pressure and calculate the flow. So it would be convenient to have a sensor which is able to measure acoustical flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor and some of its interesting applications will be presented. This micromachined device is called the microflown.
Item Type:	Conference or Workshop Item
Copyright:	© 1995 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17218
Official URL:	http://dx.doi.org/10.1109/SENSOR.1995.717278
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