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The electrostatic shuffle motor
Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark.
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| Item Type: | Conference or Workshop Item |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
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| Link to this item: | http://purl.utwente.nl/publications/17214 |
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Metis ID: 114109