The electrostatic shuffle motor


Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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