Silicon active microvalves using buckled membranes for actuation

Share/Save/Bookmark

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1994) Silicon active microvalves using buckled membranes for actuation. In: 17th Annual Semiconductor Conference, 11-16 October, 1994, Sinaia, Romania (pp. pp. 313-316).

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/17212
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 114107