Silicon active microvalves using buckled membranes for actuation

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1994) Silicon active microvalves using buckled membranes for actuation. In: 17th Annual Semiconductor Conference, 11-16 October, 1994, Sinaia, Romania.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17212
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