Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived pzt films on substrates with platinum metallization. In: Polycrystalline thin films. Materials Research Society, Pittsburgh, pp. 451-456. ISBN 9781558992436

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Item Type:	Book Section
Copyright:	© 1994 Materials Research society
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17208
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Metis ID: 114103