Miniaturized chemical analysis systems


Berg, Albert van den and Bergveld, P. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 181-184).

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Abstract:A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a flow injection analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a micro total analysis system (¿TAS) is illustrated. Possible applications of such ¿TAS are discussed, and future markets are indicated
Item Type:Conference or Workshop Item
Copyright:©1994 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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