Silicon fusion bonding with chemical mechanical polishing


Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding with chemical mechanical polishing. In: M.R. Wolffenbuttel (Ed.), Proceedings of the 1996 National Sensor Conference. , Delft, pp. 93-97. ISBN 9789040713217

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Item Type:Book Section
Copyright:© 1996 Delft University Press
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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