Silicon fusion bonding with chemical mechanical polishing

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding with chemical mechanical polishing. In: Proceedings of the 1996 National Sensor Conference. UNSPECIFIED, Delft, pp. 93-97. ISBN 9789040713217

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Item Type:	Book Section
Copyright:	© 1996 Delft University Press
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17205
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