Sacrificial wafer bonding: a useful tool in micromachining

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Spiering, V.L. and Berends, H. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Sacrificial wafer bonding: a useful tool in micromachining. In: (pp. pp. 329-334).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 114096