Buckled membranes for microstructures


Popescu, Dan O. and Lammerink, Theo S.J. and Elwenspoek, Miko (1994) Buckled membranes for microstructures. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 188-192).

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Abstract:Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes
Item Type:Conference or Workshop Item
Copyright:© 1994 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/17197
Official URL:https://doi.org/10.1109/MEMSYS.1994.555621
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