The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications

Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications. In: Proceedings of Handling and Assembly of microparts 1994.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17195
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