The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications

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Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications. In: Proceedings of Handling and Assembly of microparts 1994 (pp. pp. 1-10).

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