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Micromechanical components for µTAS

Fluitman, Jan H. and Berg van den, Albert and Lammerink, Theo S. (1994) Micromechanical components for µTAS. In: MicroTAS '94 Workshop, (Invited speaker), November 21-22, 1994, Enschede, The Netherlands.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17192
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Metis ID: 114087

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