Micromechanical components for µTAS

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Fluitman, Jan H. and Berg, Albert van den and Lammerink, Theo S. (1994) Micromechanical components for µTAS. In: MicroTAS '94 Workshop, (Invited speaker), November 21-22, 1994, Enschede, The Netherlands (pp. pp. 73-83).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/17192
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