Integrated micro-liquid dosing systems


Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Integrated micro-liquid dosing systems. In: Micro Electro Mechanical Systems, MEMS '93, Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 254-259).

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Abstract: An integrated micro-liquid dosing system consisting of a micropump and a microliquid flow sensor is demonstrated. The dosing system allows accurate dosing of liquid in the microliter regime and can easily be integrated with components such as mixers and detectors in micro-liquid handling systems. The liquid pump is of the reciprocating type with a thermopneumatic actuator. The microliquid flow sensor is based on the thermal anemometer type. Both pump and flow sensor are realized in a 3-in (100)-Si wafer using a KOH bulk etch from both sides of the wafer. Due to its small heat capacity, the flow sensor has a small time constant, making it suitable for measuring the liquid flow. The effective liquid dose is calculated by integrating the flow sensor signal. The pumped flow is in the range of 0-50 ¿l/min
Item Type:Conference or Workshop Item
Copyright:© 1993 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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