A micromechanical viewing screen: principle and feasibility


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Pol, F.C.M. van de and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands (pp. pp. 249-253).

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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