A micromechanical viewing screen: principle and feasibility
Pol van de, F.C.M. and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands.
Full text not available from this repository. The author is invited to upload the full text of this publication.
| Item Type: | Conference or Workshop Item |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/17162 |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
Repository Staff Only: item control page
Metis ID: 114057

Show download statistics for this publication
Show download statistics for this publication