Optical Excitation of Micro-Mechanical Resonators


Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J. (1991) Optical Excitation of Micro-Mechanical Resonators. In: IEEE Micro Electro Mechanical Systems, MEMS 1991: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', 30 January 1991 - 2 February 1991, Nara, Japan (pp. pp. 160-165).

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Abstract: The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory
Item Type:Conference or Workshop Item
Copyright:© 1991 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/17156
Official URL:https://doi.org/10.1109/MEMSYS.1991.114788
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