Large Deflection Performance of Surface Micromachined Corrugated Diaphragms


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Mullem, C.J. van and Gabriel, K.J. and Fujita, H. (1991) Large Deflection Performance of Surface Micromachined Corrugated Diaphragms. In: International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, TRANSDUCERS, San Fransisco, USA, 1991 (pp. pp. 1014-1017).

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Abstract:The large deflection performance was measured and modeled for its dependence on diaphragm geometries and corrugation parameters. Corrugated polyimide diaphragms of various diameters, corrugation frequencies, and thicknesses were fabricated using a surface micromachining technique. Current models correctly described the observed increase in deflection from corrugated diaphragms compared to deflections in flat diaphragms at equivalent loads. The models are extended with the definition of the transition deflection which delineates the transition between the small and large deflection regions. The range of corrugation quality factors available in surface micromachined diaphragms is determined, and predicted load-deflection curves are compared to measurements
Item Type:Conference or Workshop Item
Copyright:©1991 IEEE
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Link to this item:http://purl.utwente.nl/publications/17155
Official URL:http://dx.doi.org/10.1109/SENSOR.1991.149066
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