Single Element Excitation and Detection of (Micro-)Mechanical Resonators


Tilmans, Harrie A.C. and IJntema, Dominicus .J. and Fluitman, Jan H.J (1991) Single Element Excitation and Detection of (Micro-)Mechanical Resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 533-537).

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Abstract:The authors describe a single-element approach for the excitation and detection of the vibrational motion of (micro-)mechanical resonators. An equivalent electrical one-port network is derived for an electrostatically and a piezoelectrically driven resonator. In this way, the effect of the mechanical resonator is transformed into the electrical domain and can easily be accounted for in a circuit simulation. A detection circuit, based on an (on-chip) bridged design, is proposed as a way to compensate for the parasitic parallel load of the one-port. A criterion is given for the accepted level of unbalance of the bridge if a minimal phase shift of 90° in the transfer characteristic around resonance is required
Item Type:Conference or Workshop Item
Copyright:©1991 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 114047