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Chemical physics of wet chemical etching of silicon

Elwenspoek, M.C. (1993) Chemical physics of wet chemical etching of silicon. In: Micromachine.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17148
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Metis ID: 114043

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