Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/17146
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