Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief

Share/Save/Bookmark

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland.

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Conference or Workshop Item
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/17146
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 114041