Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief
Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland.
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/17146|
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