New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source

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Le Minh, P. and Dao Khac An and Nguyen Duc Chien and Holleman, J. and Berg, A. van den and Woerlee, P.H. and Wallinga, H. (1999) New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source. In: Third International Workshop on Materials Science, IWOMS 1999, 2-4 November 1999, Hanoi, Vietnam (pp. pp. 517-520).

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