New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source

Le Minh, P. and Dao Khac An and Nguyen Duc Chien and Holleman, J. and Berg van den, A. and Woerlee, P.H. and Wallinga, H. (1999) New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source. In: Third International Workshop on Materials Science, IWOMS 1999, 2-4 November 1999, Hanoi, Vietnam.

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Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/17076
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Metis ID: 113964