On the integration of a microdialysis-based microTAS with calibration facility on a silicon-glass sandwich

Sprenkels, Ad and Olthuis, Wouter and Bergveld, Piet (2000) On the integration of a microdialysis-based microTAS with calibration facility on a silicon-glass sandwich. In: 1st Annual lntemational IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology, October 10-12, 2000, Lyon, France.

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Abstract:	The integration is discussed of all parts of a microdialysis-based micro Total Analysis System or ¿TAS. In particular a microdialysis probe, a potentiometric and amperometric ion- and enzyme sensor and a calibration dosing pump have been developed separately using different precision machining techniques. By modifying and adapting these parts they can be realized in one generic technology consisting of a stack of a silicon and a glass wafer. The silicon wafer contains the double lumen microdialysis probe connections, a dosing pump chamber with meander formed cavities containing the calibration solutions and small cavities for both the potentiometric and amperometric sensor. The glass wafer contains all the electrical contacts and wires for the sensors, the pump and Interconnections. Both wafers are anodically bonded to each other, yielding a hermetically sealed liquid handling system
Item Type:	Conference or Workshop Item
Copyright:	©2000 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16943
Official URL:	http://dx.doi.org/10.1109/MMB.2000.893797
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