A 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer


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Setiadi, D. and Sarro, P.M. and Regtien, P.P.L. (1995) A 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer. In: 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 644-647).

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Abstract:This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.
Item Type:Conference or Workshop Item
Copyright:© 1995 IEEE Press
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Link to this item:http://purl.utwente.nl/publications/16579
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