Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor

Setiadi, D. and Regtien, P.P.L. (1994) Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor. In: 8th International Symposium on Electrets, ISE 8, September 7-9, 1994, Paris, France.

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Abstract:	This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values
Item Type:	Conference or Workshop Item
Copyright:	© 1994 IEEE Press
Research Group:	Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/16542
Official URL:	http://dx.doi.org/10.1109/ISE.1994.515256
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