Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Hien, T. and Elwenspoek, M.C. (2000) Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In: Micro-Electro-Mechanical Systems, MEMS 2000, November 5-10, 2000, Orlando, USA.

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Abstract:	In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16247
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