Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation

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Nijdam, A.J. and Veenendaal van, E. and Cuppen, H. and Suchtelen van, J. and Reed, M.L. and Gardeniers, J.G.E. and Enckevort van, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2000) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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