Formation and stabilization of pyramidal etch hillocks on silicon ${100}$ in anisotropic etchants: experiments and Monte Carlo simulation

Nijdam, A.J. and Veenendaal van, E. and Cuppen, H. and Suchtelen van, J. and Reed, M.L. and Gardeniers, J.G.E. and Enckevort van, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2000) Formation and stabilization of pyramidal etch hillocks on silicon ${100}$ in anisotropic etchants: experiments and Monte Carlo simulation. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/16191
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Formation and stabilization of pyramidal etch hillocks on silicon in anisotropic etchants: experiments and Monte Carlo simulation