A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg van den, A. (2000) A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16189
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