High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg van den, A. and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/16188
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Metis ID: 113073