High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex
Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg van den, A. and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/16188|
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