High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

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Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg van den, A. and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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